A spiral capacitive sensor for robotic finger tactile feedback and future low-cost intraocular pressure monitoring

Nguyen Dac Hai, Le Manh Long, Tran Van Tung

Hanoi University of Industry, Ha Noi, Viet Nam

Keywords: pressure sensors, capacitance sensor, tactile feedback, robotic finger, intraocular pressure, coplanar electrodes.

Abstract. This paper presents the research, design, and simulation of a coplanar capacitive pressure sensor for robotic finger tactile sensing during object manipulation. The proposed sensor is capable of detecting applied forces up to 1 N. As the force increases from 0 N to 1 N, the sensor's capacitance shifts from 0 fF to 112 fF. The sensor performance was investigated using ANSYS Maxwell in conjunction with ANSYS Mechanical. Simulation results demonstrate a clear capacitance variation in response to the applied force. This sensor can be integrated into industrial applications to measure contact pressure in robotic fingers, enhancing their tactile sensing capabilities during grasping tasks.